--Glass processing chamber: ∮100mm; 130mm High.
--Specimen stage size: ∮40mm( Hold 6 specimen cups)
--Golden target size:
∮58mm*0.12mm(thickness)
--Vacuum detection: Pirani gage
--Vacuum protection:20 pa with microscale inflation valve
--Medium Gas:Argon or air with argon gas special air inlet and gas regulating in microscale.
| A50.7011 Ion Sputter Coater | |
| Vacuum Chamber | Dia 100mm*H130mm |
| Specimen Stage | Dia 40mm(Hold 6 Specimen Cups) |
| Gold Sputtering Target | Dia 58mm*0.12mm(thickness) |
| Vacuum Gauge | Pirani Gage |
| Vacuum Pump | Rotation Vane Pums: 2L / s |
| Vacuum Protection Point | 20Pa With Microscale Inflation Valve |
| Working Gas | Argon or air with argon gas special air inlet and gas regulating in microscale |
| Sputtering Voltage | 1.6KV |
| Gross Weight | 48kg |
| Compliance | CE |
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