| Specification | A62.4500 | A622.4501 | A62.4503 | A62.4505 |
|---|---|---|---|---|
| Work Mode | Tapping Mode 【Optional】 Contact Mode Friction Mode Phase Mode Magnetic Mode Electrostatic Mode |
Contact Mode Tapping Mode 【Optional】 Friction Mode Phase Mode Magnetic Mode Electrostatic Mode |
Contact Mode Tapping Mode 【Optional】 Friction Mode Phase Mode Magnetic Mode Electrostatic Mode |
Contact Mode Tapping Mode 【Optional】 Friction Mode Phase Mode Magnetic Mode Electrostatic Mode Current Spectrum Curve |
| Output | RMS-Z Curve 【Optional】 F-Z Force Curve |
RMS-Z Curve F-Z Force Curve |
RMS-Z Curve F-Z Force Curve |
RMS-Z Curve F-Z Force Curve |
| XY Scan Range | 20×20um | 20×20um | 50×50um | 50×50um |
| XY Scan Resolution | 0.2nm | 0.2nm | 0.2nm | 0.2nm |
| Z Scan Range | 2.5um | 2.5um | 5um | 5um |
| Y Scan Resolution | 0.05nm | 0.05nm | 0.05nm | 0.05nm |
| Scan Speed | 0.6Hz~30Hz | 0.6Hz~30Hz | 0.6Hz~30Hz | 0.6Hz~30Hz |
| Scan Angle | 0~360° | 0~360° | 0~360° | 0~360° |
| Sample Size | Φ≤90mm H≤20mm |
Φ≤90mm H≤20mm |
Φ≤90mm H≤20mm |
Φ≤90mm H≤20mm |
| XY Stage Moving | 15×15mm | 15×15mm | 25×25um | 25×25um |
| Shock-Absorbing Design | Spring Suspension | Spring Suspension Metal Shielding Box |
Spring Suspension Metal Shielding Box |
- |
| Optical System | 4x Objective Resolution 2.5um |
4x Objective Resolution 2.5um |
4x Objective Resolution 2.5um |
Eyepiece 10x Infinity Plan LWD APO 5x10x20x50x 5.0M Digital Camera 10" LCD Monitor, With Measuring LED Kohler Illumination Coaxial Coarse & Fine Focusing |
| Output | USB2.0/3.0 | USB2.0/3.0 | USB2.0/3.0 | USB2.0/3.0 |
| Software | Win XP/7/8/10 | Win XP/7/8/10 | Win XP/7/8/10 | Win XP/7/8/10 |
| Microscope | Optical Microscope | Electron Microscope | Scanning Probe Microscope |
|---|---|---|---|
| Max Resolution (um) | 0.18 | 0.00011 | 0.00008 |
| Remark | Oil immersion 1500x | Imaging diamond carbon atoms | Imaging high-order graphitic carbon atoms |
| Image |
| Force | Measure Signal | Information |
|---|---|---|
| Electrostatic Force | Phase | charge distribution |
| Tunnel Current | Current | Shape, Conductivity |
| Magnetic Force | Phase | Magnetic Structure |
| Resolution | Working Condition | Working Temperature | Damage to Sample | Inspection Depth | |
|---|---|---|---|---|---|
| SPM | Atom Level 0.1nm | Normal, Liquid, Vacuum | Room or Low Temperature | None | 1~2 Atom Level |
| SEM | 6-10nm | High Vacuum | Room Temperature | Small | 10mm @10x 1um @10000x |
| FIM | Atom Level 0.1nm | Super High Vacuum | 30~80K | Damage | Atom Thickness |