◆ The laser detection head and the sample scanning stage are integrated, the structure is very stable, and the anti-interference is strong ◆ Precision probe positioning device, laser spot alignment adjustment is very easy ◆ The single-axis drive sample automatically approaches the probe vertically, so that the needle tip is perpendicular to the sample scan ◆ The intelligent needle feeding method of motor-controlled pressurized piezoelectric ceramic automatic detection protects the probe and the sample ◆ High-precision and wide-ranging piezoelectric ceramic scanners can be freely selected ◆ High-magnification objective lens automatic optical positioning, no need to focus, real-time observation and positioning of the probe sample scanning area ◆ Spring suspension shockproof method, simple and practical, good shockproof effect ◆ Metal shielded soundproof box, built-in high-precision temperature and humidity sensor, real-time monitoring of the working environment ◆ Integrated scanner nonlinear correction user editor, nanometer characterization and measurement accuracy better than 98% |
Specification | A62.4500 | A62.4501 | A62.4503 | A62.4505 |
Work Mode | Tapping Mode 【Optional】 Contact Mode Friction Mode Phase Mode Magnetic Mode Electrostatic Mode |
Contact Mode Tapping Mode 【Optional】 Friction Mode Phase Mode Magnetic Mode Electrostatic Mode |
Contact Mode Tapping Mode 【Optional】 Friction Mode Phase Mode Magnetic Mode Electrostatic Mode |
Contact Mode Tapping Mode 【Optional】 Friction Mode Phase Mode Magnetic Mode Electrostatic Mode |
Current Spectrum Curve | RMS-Z Curve 【Optional】 F-Z Force Curve |
RMS-Z Curve F-Z Force Curve |
RMS-Z Curve F-Z Force Curve |
RMS-Z Curve F-Z Force Curve |
XY Scan Range | 20×20um | 20×20um | 50×50um | 50×50um |
XY Scan Resolution | 0.2nm | 0.2nm | 0.2nm | 0.2nm |
Z Scan Range | 2.5um | 2.5um | 5um | 5um |
Y Scan Resolution | 0.05nm | 0.05nm | 0.05nm | 0.05nm |
Scan Speed | 0.6Hz~30Hz | 0.6Hz~30Hz | 0.6Hz~30Hz | 0.6Hz~30Hz |
Scan Angle | 0~360° | 0~360° | 0~360° | 0~360° |
Sample Size | Φ≤90mm H≤20mm |
Φ≤90mm H≤20mm |
Φ≤90mm H≤20mm |
Φ≤90mm H≤20mm |
XY Stage Moving | 15×15mm | 15×15mm | 25×25um | 25×25um |
Shock-Absorbing Design | Spring Suspension | Spring Suspension Metal Shielding Box |
Spring Suspension Metal Shielding Box |
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Optical Syestem | 4x Objective Resolution 2.5um |
4x Objective Resolution 2.5um |
10x Objective Resolution 1um |
Eyepiece 10x Infinity Plan LWD APO 5x10x20x50x 5.0M Digital Camera 10" LCD Monitor, With Measuring LED Kohler Illumination Coaxial Coarse & Fine Focusing |
Output | USB2.0/3.0 | USB2.0/3.0 | USB2.0/3.0 | USB2.0/3.0 |
Software | Win XP/7/8/10 | Win XP/7/8/10 | Win XP/7/8/10 | Win XP/7/8/10 |
Resolution | Working Condition | Working Temperation | Damge to Sample | Inspection Depth | |
SPM | Atom Level 0.1nm | Normal, Liquid, Vacuum | Room or Low Temperation | None | 1~2 Atom Level |
TEM | Point 0.3~0.5nm Lattice 0.1~0.2nm |
High Vaccum | Room Temperation | Small | Usually <100nm |
SEM | 6-10nm | High Vaccum | Room Temperation | Small | 10mm @10x 1um @10000x |
FIM | Atom Level 0.1nm | Super High Vaccum | 30~80K | Damge | Atom Thickness |
Microscope | Optical Microscope | Electron Microscope | Scanning Probe Microscope |
Max Resolution (um) | 0.18 | 0.00011 | 0.00008 |
Remark | Oil immersion 1500x | Imaging diamond carbon atoms | Imaging high-order graphitic carbon atoms |
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Probe-Sample Interaction | Measure Signal | Information |
Force | Electrostatic Force | Shape |
Tunnel Current | Current | Shape, Conductivity |
Magnetic Force | Phase | Magnetic Structure |
Electrostatic Force | Phase | charge distribution |